CHARGED PARTICLE DETECTION SYSTEM AND METHOD

摘要

A charged particle detection device comprising an electric field generator configured and operable to create an electric field defining trajectories for charged particles of different types emitted from a sample as a result of the sample interaction with a particle beam, the emitted charged particles of different types being one of the following: electrons, positive ions and negative ions, an ion-to-electron converter having a conversion surface including a continuous interaction region oriented so as to intersect the trajectories of the charged particles of different types propagating from the sample, the conversion surface operative to emit electrons in response to the surface interaction with the charged particles of the different types, and an electron detector configured and operable to receive electrons from the converter and generate output data indicative thereof.