HETERODYNE METHOD FOR CARRYING OUT TEMPERATURE MEASUREMENTS

摘要

The invention relates to a method for observing the amplitude and phase of spectral components of the temperature increase in regions (3) of an integrated circuit (5), caused by the operation of a circuit or device (2) arranged in the semiconductor crystal (1). Said circuit or device (2) is activated by an electrical signal (4) containing the sum of two sine functions at frequencies f1 and f2. The frequency of the spectral component of the temperature measured is F=f 2- f 1. The detected temperature depends on the electrical signals (voltages and currents) in the circuit or device (2) at the frequencies f1 and f2. Said detected temperature can be used, without this example limiting the application of the invention, to detect abnormally high voltage and current levels at these frequencies.