| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stable liquid removing (liquid cutting-off) capacity of a liquid removing apparatus having a simple and low-cost structure, for a long period of time. Ž<P>SOLUTION: The apparatus for treating a substrate includes a stripping chamber 1. A first air knife 14 that ejects air onto the surface of a substrate after stripping treatment and removes a stripping liquid, is disposed in the stripping chamber 1. The air knife 14 includes a cylindrical body 15 held in a manner intersecting a transfer path, and a plurality of nozzles 16 for ejecting air disposed on the body 15 mutually apart and at prescribed intervals. Each of the plurality of nozzles 16 has a prescribed ejection angle in a direction parallel to the axial direction of the body 15 and is disposed on the cylindrical body 15 so as to eject air in a flat shape in a direction orthogonal thereto and to allow the air in its ejection direction to include a component proceeding from downstream to upstream in the direction of conveying the substrate. The interval between each of the nozzles 16 and the distance from each of the nozzles 16 to a substrate S being conveyed are set up in such a manner that air ejection areas of the neighboring nozzles 16 overlap one after another in the axial direction on the substrate S. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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