| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily obtain a state that a mirror turnably provided in a mirror substrate and an electrode provided in an electrode substrate are adjacent to each other, with high positional (pitch) accuracy. Ž<P>SOLUTION: A micromirror element includes: a support substrate 101; the mirror substrate 102, supported by a support section (a frame section 126) above the support substrate 101, and having the turnable mirror 125; and the electrode substrate 103, having a control electrode section 132 disposed so as to face the mirror 125, and fixed on the support substrate 101 under the mirror substrate 102. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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