MAGNETIC SHEET AND METHOD FOR MANUFACTURING THE SAME

摘要

Provided is a magnetic sheet which is formed by forming a film by sputtering a high-resistance soft magnetic film (Fe-M-O) on a substrate and is to be used for an RFID or for the purpose of suppressing electromagnetic waves.  A method for manufacturing such magnetic sheet is also provided. A magnetic sheet (4) is inserted between an RFID tag (2) and a metal member (3).  On the magnetic sheet (4), a high-resistance magnetic film formed of a film structure of an amorphous phase and a fine crystalline phase is formed on a resin sheet by sputtering.  The amorphous phase is composed of A-M-O (wherein, an element A is Fe or Co or a mixture of Fe and Co, an element M is at least one element selected from among Hf, Ti, Zr, V, Nb, Ta, Mo, W, Al, Mg, Zn or Ca), and contains a compound of the elements M and O.  The fine crystalline phase has, as a main component, one or two kinds of elements selected from Fe or Co scattered in the amorphous phase and has an average crystal grain diameter of 30 nm or less.  Thus, RFID characteristics can be effectively improved, and the magnetic sheet can contribute to thinning.  Furthermore, heat treatment is not requirement for the Fe-M-O film.