发明名称 APPARATUS FOR POSITIONING FLAT PLANAR MATERIAL
摘要 PROBLEM TO BE SOLVED: To provide an apparatus capable of positioning a flat planar material at a predetermined position irrespective of a thickness and dimensions of the material to be mounted and without damaging an alignment table or the flat planar material. SOLUTION: The positioning apparatus 1 for causing the flat planar material 6 mounted on the alignment table 2 to float to position the material 6 comprises an air blowout hole 3 for blowing the air slantly upward toward a first side 24 and a second side 25 which are adjacent across a corner 26, and a regulating part 4 provided on the first and second sides 24 and 25 for positioning an end of the flat planar material 6. In addition, a vertical hole 31 having its axial hole vertically directed is provided to cause the material 6 to surely float. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009279666(A) 申请公布日期 2009.12.03
申请号 JP20080131284 申请日期 2008.05.19
申请人 TIKUSON CO LTD 发明人 TAKEMURA KAZUTAKA
分类号 B23Q3/18;H01L21/68 主分类号 B23Q3/18
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