| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a highly reliable surface emitting laser element wherein the occurrence of dislocation is suppressed even when a DBR (Distributed Bragg Reflector) mirror is formed on a substrate. Ž<P>SOLUTION: In a surface emitting laser element 100, an average distortion of a lower DBR mirror 2 and a film thickness of the lower DBR mirror 2 are so set that warpage of a substrate 1 satisfies a prescribed condition, and nitrogen is added to the lower DBR mirror 2 with a composition, for example, of 0.028 to 0.390% corresponding to the set average distortion of the lower DBR mirror 2 on the basis of the relation between the average distortion of the lower DBR mirror 2 and an average nitrogen composition included in the lower DBR mirror 2, whereby the occurrence of dislocation can be properly suppressed even when the DBR mirror is formed on the substrate 1. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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