| 摘要 |
The present invention relates to an optical position measuring device for detecting a relative position of a scanning unit, and a material measure that can be moved for this purpose in at least one measuring direction. In a first variant, the scanning unit comprises a light source, at least one scanning grating, a detector arrangement, and an attenuation structure, by means of which the light intensity on the detector arrangement can be specifically set. The scanning grating and the attenuation structure are disposed on the front and rear sides of a transparent carrier element in the scanning beam path. In a second variant, the scanning unit comprises a light source, a detector arrangement, and an attenuation structure. The attenuation structure has a perviousness that varies at least in one direction as a function of the location such that a light intensity results that is uniform at least in said direction on the detector arrangement. |
