| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device wherein the damage of a structure due to vibrations of an earthquake or the like is reduced more surely, and a vibration prevention method of the exposure device. <P>SOLUTION: The exposure device includes: a structure (110) supported by a floor portion (F); and a controller (CONT) which causes the structure to be supported in a prescribed state on the basis of information relating to a velocity of the structure due to vibrations of the floor portion. <P>COPYRIGHT: (C)2010,JPO&INPIT |
