| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a color filter manufacturing line system, decreasing the number of cassette ports, reducing the proportion of an empty space in a clean room occupied by a manufacturing line, avoiding increase in construction and operation cost, and preventing the occurrence of a temporary stop of a processing line due to the supply of cassettes. <P>SOLUTION: A substrate determination device RB-2 includes a substrate temporary placing device BF. The throughput of a glass substrate per hour of a substrate collecting device is set higher than that of a process device P-2, and the substrate collecting device is provided with two cassette ports CSP. In a management system for the glass substrate, when a cassette CS is filled, a glass substrate determined to be stored is held on-standby and accumulated BF on the cassette port; and when an empty cassette is supplied, the standby and accumulated glass substrate is stored on the cassette on the cassette port with priority. <P>COPYRIGHT: (C)2010,JPO&INPIT |
