发明名称 ORTHOGONAL RADIO FREQUENCY VOLTAGE/CURRENT SENSOR HAVING HIGH DYNAMIC RANGE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a radio frequency (RF) sensor for measuring a RF current. <P>SOLUTION: The radio frequency (RF) sensor includes a printed board 12. The printed board 12 has an inner periphery for defining an opening 18. A conductor is extended so as to pass through the opening 18. A sensor pad 30 is disposed on the opening 18. Two sensor group are formed by connecting the sensor pads. A loop generates an electrical signal for indicating a flow of a RF current flowing in the conductor. A plurality of circular conductive ring are provided in the RF sensor. A signal for indicating a voltage of the conductor can be generated. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2009282017(A) 申请公布日期 2009.12.03
申请号 JP20090096288 申请日期 2009.04.10
申请人 MKS INSTRUMENTS INC 发明人 HECKLEMAN TODD;COUMOU DAVID J;CHAWLA YOGENDRA K
分类号 G01R15/18;G01R15/06 主分类号 G01R15/18
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