METHOD FOR DEPOSITING THIN FILM FOR MAGNETIC RECORDING MEDIUM AND DEPOSITION APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To film-deposit a thin film for a magnetic recording medium, having superior step coverage and corrosion resistance/wear resistance by an FCVA (filtered cathodic vacuum arc) method even on a magnetic recording layer on which comparatively large surface ruggedness is formed. SOLUTION: A rotation driving mechanism part and a tilt mechanism part are controlled by a control unit 40, thereby continuously changing the tilt angle θ of a substrate holder 20 and a substrate 28' for the recording medium, from the minimum tilt angle to the maximum tilt angle, according to increase of film thickness of a protective film layer during film deposition. COPYRIGHT: (C)2010,JPO&INPIT