发明名称 WIRE BREAKING PREDICTION APPARATUS AND THERMAL TREATMENT APPARATUS OF ELECTRIC POWER USING SYSTEM
摘要 <P>PROBLEM TO BE SOLVED: To provide a wire breaking prediction apparatus of electric power using systems which is capable of accurately measuring a voltage and a current to the electric power using systems, highly accurately determining a resistance value, and accurately predicting the breaking of wires. Ž<P>SOLUTION: The wire breaking prediction apparatus 26 provided for the electric power supply circuit system 24 which controls electric power separately supplied for the electric power using systems 42A-42E via feeding lines 46A-46E includes: pulse wave generating means 52A-52E each provided for feeding lines for generating pulse waves of different frequencies correspondingly to an off period; pulse wave mixing means 54A-54E for mixing pulse waves generated by a self-pulse wave generating means; pulse wave detecting means 56A-56E for detecting self-pulse waves to be transmitted; and a determination means 58 for determining the prediction of the breaking of wires of the electric power using systems on the basis of pulse waves detected by the pulse wave detecting means. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009281837(A) 申请公布日期 2009.12.03
申请号 JP20080133684 申请日期 2008.05.21
申请人 TOKYO ELECTRON LTD 发明人 ISHII KAZUHIRO;HASEGAWA KOSUKE;SUZUKI JUNYA;INATOMI YASUHIRO
分类号 G01R31/02;C23C14/54;C23C16/52;H01L21/205;H01L21/31;H05B3/00 主分类号 G01R31/02
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