| 摘要 |
<P>PROBLEM TO BE SOLVED: To smooth a surface of an optical element by etching ruggedness of nano order formed on the surface of the optical element inexpensively, with small power and also in a short time without depending on surface shape of the optical element. Ž<P>SOLUTION: By arranging the optical elements 2 so as to be overlapped at a plurality of stages in raw material gas atmosphere, and irradiating them with light having wavelength equal to or above absorption end wavelength of gas molecules composing the raw material gas, the light is successively transmitted from an upper stage to a lower stage of the optical elements 2, and the raw material gas is dissociated based on near-field light generated at least at a pointed part in the ruggedness formed on the surface of each optical element 2, and then etching is performed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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