| 发明名称 |
CARBON NANOTUBES AS INTERCONNECTS IN INTEGRATED CIRCUITS AND METHOD OF FABRICATION |
| 摘要 |
A method of making an electrode, such as an interconnect for a semiconductor device, includes forming aligned carbon nanotubes using dielectrophoresis.
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| 申请公布号 |
US2009294966(A1) |
申请公布日期 |
2009.12.03 |
| 申请号 |
US20080127740 |
申请日期 |
2008.05.27 |
| 申请人 |
UNIDYM, INC.;DUKE UNIVERSITY |
发明人 |
LIU JIE;MORRAL ANNA FONTCUBERTA I |
| 分类号 |
H01L23/52 |
主分类号 |
H01L23/52 |
| 代理机构 |
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代理人 |
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