发明名称 FINFET WITH IMPURITY BLOCKING PORTION ON AN UPPER SURFACE OF FIN
摘要 <p>A semiconductor device includes: a fin-type semiconductor region (13) formed on a substrate (11); a gate insulating film (14) formed so as to cover an upper surface and both side surfaces of a predetermined portion of the fin-type semiconductor region (13); a gate electrode (15) formed on the gate insulating film (14); and an impurity region (17) formed on both sides of the gate electrode (15) in the fin-type semiconductor region (13). An impurity blocking portion (15a) for blocking the introduction of impurities is provided adjacent both sides of the gate electrode (15) over an upper surface of the fin-type semiconductor region (13).</p>
申请公布号 WO2009144874(A1) 申请公布日期 2009.12.03
申请号 WO2009JP01974 申请日期 2009.04.30
申请人 PANASONIC CORPORATION;SASAKI, YUICHIRO;OKASHITA, KATSUMI;NAKAMOTO, KEIICHI;MIZUNO, BUNJI 发明人 SASAKI, YUICHIRO;OKASHITA, KATSUMI;NAKAMOTO, KEIICHI;MIZUNO, BUNJI
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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