发明名称 APPARATUS FOR TRANSFERRING AND APPARATUS FOR PROCESSING A GLASS INCLUDING THE SAME
摘要 <p>PURPOSE: An apparatus for transferring and apparatus for processing a glass including the same are provided to prevent the seal belt from being deviated of roller by using rounded seal belt. CONSTITUTION: The transfer chamber has the opening formed the top and bottom. The supporting member is installed inside the transfer chamber to support the substrate. The transfer member is connected to the supporting member and transfers the supporting member to the top and bottom. The seal belt(50) covers up the opening of the transfer chamber while passing through the transfer member. The side(62) contacting the seal belt is rounded to focus force at the central region by the roller(60). The contact surface is convex or concaved.</p>
申请公布号 KR20090124523(A) 申请公布日期 2009.12.03
申请号 KR20080050794 申请日期 2008.05.30
申请人 SEMES CO., LTD. 发明人 JU, JAE SUNG
分类号 H01L21/677 主分类号 H01L21/677
代理机构 代理人
主权项
地址