| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an insulating film for a capacitor element, and the capacitor element, in which the coexistence of a large dielectric ratio and a leakage current suppression is possible, further being excellent also in the uniformity of characteristics. <P>SOLUTION: The insulating film for the capacitor element is adopted, which is the insulating film used for the capacitor element having a pair of electrodes and the insulating film sandwiched by the pair of electrodes, wherein a metal element which constitutes a metal oxide whose band gap is large to niobium pentoxide is added to the niobium pentoxide. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
