发明名称 |
Semiconductor packages having electromagnetic interference-shielding function, manufacturing method thereof and jig |
摘要 |
The present invention relates to relates to a semiconductor package having a function of shielding electromagnetic interference (EMI), a manufacturing method thereof and a jig, and more particularly, to such a semiconductor package having an electromagnetic interference (EMI)-shielding function, a manufacturing method thereof and a jig for use in a plasma sputtering, in which a nickel alloy is coated on the surface of a semiconductor package by a sputtering method so as to shield electromagnetic interference (EMI) generated from the semiconductor package.
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申请公布号 |
US2009294930(A1) |
申请公布日期 |
2009.12.03 |
申请号 |
US20090474375 |
申请日期 |
2009.05.29 |
申请人 |
YOON JUM-CHAE;HYUN EUN-SOO;KIM SEUNG-KI |
发明人 |
YOON JUM-CHAE;HYUN EUN-SOO;KIM SEUNG-KI |
分类号 |
H01L23/552;C23C14/00;H01L21/56;H01L21/60;H01L21/78 |
主分类号 |
H01L23/552 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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