| 摘要 |
A fluid supply apparatus enables the direction of movement of a fluid to be changed easily while maintaining high barrier property and durability. The fluid supply apparatus includes an upper cylinder having a first and a second supply/discharge opening for supplying or discharging a fluid. A piston is movably disposed within a lower cylinder, forming a cylinder internal chamber. A fluid channel open/close member is rotatably disposed in the upper cylinder. The fluid channel open/close member opens or closes a channel communicating the first or the second supply/discharge opening with the cylinder internal chamber, while closing at least one of the first and the second supply/discharge openings at any time. The rotation of the fluid channel open/close member is linked with the movement of the piston by a cam groove and a cam pin.
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