| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a system for automatic virtual measurement, holding favorably precision of the virtual measurement, and also to provide a method therefor. <P>SOLUTION: This system for the automatic virtual measurement includes: the first process device 20a for producing the first work, based on a process data; the first measuring instrument 22a having a plurality of history measured data of observed data of the works produced respectively using the process data, and the first observed value of the first work; the first automatic virtual measurement server 30a for collecting a history process data and a history measured value; a model construction server 60 for constructing a virtual measurement model, using the history process data and the history measured value; the second process device 20b for producing the second work, based on the second process data, the second measuring instrument 22b for measuring the second observed value of the second work; and the second automatic virtual measurement server 30b for conducting the virtual measurement of the second work, using the virtual measurement model. <P>COPYRIGHT: (C)2010,JPO&INPIT |
