| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a film type photodegradable transfer material capable of preventing reflection caused by a substrate, when exposed, to provide easily an objective pattern shape, and capable of enhancing a resolution and a filament tightening force. <P>SOLUTION: The film type photodegradable transfer material includes: a support body film; a photodegradable photoresist layer; and a reflection restraining layer formed on a face laminated to the substrate. <P>COPYRIGHT: (C)2010,JPO&INPIT |
