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发明名称
BUMP LEVELING DEVICE AND ITS METHOD
摘要
申请公布号
JPH10163215(A)
申请公布日期
1998.06.19
申请号
JP19960324479
申请日期
1996.12.05
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
YAMAMOTO AKIHIRO;IMANISHI MAKOTO;YONEZAWA TAKAHIRO;EGUCHI SHINZO;NAKAO OSAMU
分类号
H01L21/60;H01L21/00;(IPC1-7):H01L21/321
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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