| 摘要 |
A stacked structure which includes at least one movable member which is movable, and a guide shaft which regulates a movement of the movable member, and which is manufactured by using a metal layer formation process and an etching process, is for manufacturing an ultra-small variable aperture apparatus as a stacked structure by using a plating process, other metal-layer formation process, and the etching process, and for making small a shaking of a diaphragm blade as a movable member, which is caused due to the clearance around the shaft. A groove portion having a first distance and a groove portion having a second distance are formed continuously in the movable member, and the second distance is smaller than the first distance. A guide shaft regulates a movement of the movable member along the groove portion having the second distance.
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