BIPOLAR PULSE POWER SOURCE AND POWER SOURCE DEVICE FORMED BY A PLURALITY OF BIPOLAR PULSE POWER SOURCES

摘要

Provided is a bipolar pulse power source which can effectively limit a current increase upon generation of arc discharge which causes generation of splash and particles and prevent generation of overvoltage upon polarity inversion. The bipolar pulse power source includes a bridge circuit (22) formed by switching elements (SW1 to SW4) connected between the positive and the negative DC output from a DC power supply source (1) and controls operation of the switching elements so as to perform a bipolar pulse-shaped output with a predetermined frequency to a pair of electrodes in contact with plasma.  An output characteristic switching circuit is provided for switching the output so that the output to the electrode has a constant voltage characteristic at the first stage and then the output to the electrode has a constant current characteristic.