发明名称 METHOD FOR TRANSFER OF NANOWIRE
摘要 PURPOSE: A method for transferring a nanowire is provided to prevent the nanowire of the undesired part from being transferred and to allow a nanowire to be transferred to the intended position of a substrate accurately, thereby increasing the degree of integration of clear nanowire. CONSTITUTION: A method for transferring a nanowire comprises the steps of preparing a first substrate(400) where a nanowire is manufactured; forming the level difference so as to form a projected part(450) on a second substrate; forming a thermal oxide film on the second substrate(440) in which the level difference is formed; coating an adhesive(430) on the second substrate in which the thermal oxide film is formed; and transferring a nanowire(420) to the second substrate. The step for transferring the nanowire to the second substrate comprises the steps of adhering the nanowire to the adhesive; and separating the adhered nanowire and the first substrate.
申请公布号 KR20090124504(A) 申请公布日期 2009.12.03
申请号 KR20080050765 申请日期 2008.05.30
申请人 KOREA ELECTRONICS TECHNOLOGY INSTITUTE 发明人 JUNG, SUK WON;SHIN, KYU SIK;LEE, KOOK NYUNG;KIM, WON HYO;LEE, MIN HO;SEONG, WOO KYEONG
分类号 B82B3/00;H01L21/20 主分类号 B82B3/00
代理机构 代理人
主权项
地址