Fluidsensor für flüssige und gasförmige organische Verbindungen sowie Verfahren zu seiner Herstellung

摘要

The invention relates to a liquid sensor for liquid and gaseous organic compounds, comprising an electrical sensor resistor (8; 28) whose electrical conductivity varies according to the presence of a penetrating liquid and which is made of a non-conductor which can be diffused by said liquid and by carbon particles embedded therein. The inventive device is characterized in that the sensor resistor (8; 28) is a film resistor deposited on a non-conductive substrate (2; 24) in the shape of a ceramic body, wherein the carbon particles are arranged in such an amount as ultra fine carbon black particles so that they do not as a general rule touch each other. Contact with the film resistor is preferably made by electrodes (6; 26) which are manufactured on the substrate (2; 24) using thick film technology, forming a micro-toothed structure by means of small silicate crystals arranged therein and which engages with the sensor resistor. The inventive fluid sensor is characterized by high sensitivity, high dynamics, high stability and good recovery properties. It is also easy and therefore more economical to produce.