| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for treating exhaust gas containing chloropolysilane, by which the exhaust gas containing chloropolysilane can be detoxified efficiently and safely and which is simple, easy and excellent in cost effectiveness and to provide a treatment apparatus to be used in the method for treating exhaust gas containing chloropolysilane. <P>SOLUTION: The method for treating exhaust gas comprises: a contact step of contacting the exhaust gas containing chloropolysilane with an acidic aqueous solution; and a pH adjustment step of adjusting the pH of an acid-treated liquid, which is obtained at the contact step, to 10-14 by using an alkaline material. The apparatus for treating exhaust gas is provided with: an acid treatment tank 11 for carrying out the contact step; and an alkali treatment tank 16 for carrying out the pH adjustment step. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
