OPTICAL WAVEGUIDE SUBSTRATE WITH OPTICAL FIBER FIXATION GROOVE, PROCESS FOR ITS PRODUCTION, STAMPS FOR USE IN THIS PRODUCTION PROCESS, AND OPTO-ELECTRONIC HYBRID INTEGRATED MODULE INCLUDING SAID OPTICAL WAVEGUIDE SUBSTRATE

摘要

An optical waveguide substrate with an optical fiber fixation groove, including an optical waveguide which contains a lower cladding layer on a base substrate, wherein the lower cladding layer has an optical fiber fixation groove and a core groove, and a weir is provided between the optical fiber fixation groove and the core groove. The optical waveguide substrate with an optical fiber fixation groove is produced by forming a lower cladding layer on a base substrate using a male stamp produced from a female stamp and then successively forming a core layer and an upper cladding layer thereon. The stamp for use in such a production process includes concave portions or convex portions, corresponding to the optical fiber fixation groove and the core groove, as well as a convex portion or a concave portion corresponding to the weir. An opto-electronic hybrid integrated module includes the optical waveguide substrate with an optical fiber fixation groove.