| 摘要 |
A static pressure slider 1 includes a stationary member 2, a movable member 3, and a measuring unit for measuring an actual distance between the stationary member 2 and the movable member 3. Preferably, the measuring unit includes conductive layers 21-24, 31A-34A respectively formed on the stationary member and the movable member 3. The measuring unit may serve to measure a capacitance between guiding surfaces 25-28 and surfaces facing thereto. |
