发明名称 METHODS OF FORMING DATA CELLS AND CONNECTIONS TO DATA CELLS
摘要 Disclosed are methods and devices, among which is a method that includes forming a lower conductive material on a substrate, forming a stop material on the substrate, forming a sacrificial material on the substrate, etching the sacrificial material with an etch that is selective to the sacrificial material and selective against the stop material, and etching the lower conductive material.
申请公布号 US2009294842(A1) 申请公布日期 2009.12.03
申请号 US20080130825 申请日期 2008.05.30
申请人 MICRON TECHNOLOGY, INC. 发明人 JUENGLING WERNER
分类号 H01L21/28;H01L29/78 主分类号 H01L21/28
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