| 摘要 |
An apparatus for analyzing an integrated circuit to which one or more test signals are applied. An example apparatus includes an objective lens that views reflections from the integrated circuit, a device that houses at least two optical fibers, a component that receives reflections from the objective lens and directs the received reflections to the device, and a photo-diode that receives a reflection received by the device. The apparatus includes a beam splitter that directs reflections from the integrated circuit to a detector. A processing device generates an image signal based on a signal received from the detector and a display outputs an image based on the image signal. The component includes a scan mirror that reflects the collimated reflections to a collimating lens that focuses the reflections from the scan mirror toward the device.
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