发明名称 FILM TYPE PHOTODEGRADABLE TRANSFER MATERIAL
摘要 Disclosed herein is a film-type photodegradable transfer material, comprising: a support film; a resin protection layer; a photodegradable photoresist layer; and a cover film, wherein the resin protection layer has an adhesion force of 0.05 kgf or less. When the film-type photodegradable transfer material is used to form a fine circuit pattern, such as a printed circuit board or the like, the resolution of the pattern can be increased by minimizing the distance between a mask and a photosensitive resin layer at the time of exposure, and work can be performed in the form of a sheet or a roll to roll process can be applied to the work even when the support film has been removed before an exposure process.
申请公布号 WO2009145520(A2) 申请公布日期 2009.12.03
申请号 WO2009KR02653 申请日期 2009.05.20
申请人 KOLON INDUSTRIES, INC.;MOON, HEE WAN;LEE, BYEONG IL 发明人 MOON, HEE WAN;LEE, BYEONG IL
分类号 G03F7/004 主分类号 G03F7/004
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