| 摘要 |
PURPOSE: A substrate transport apparatus and a method thereof for dying resentment of cooing gas are provided to unload a holder and a glass substrate from a boat after cooling the glass substrate by ejecting gas from an arm of a holder transfer robot. CONSTITUTION: A holder(12) accepts a glass substrate(10). An arm(100) comprises a gas supply path(200) on the glass substrate. After the thermal process of the glass substrate is completed in the furnace, the gas is sprayed through the gas supply path to the glass substrate. The arm unloads the holder and the cooled glass substrate from the furnace. |
