ION BEAM IRRADIATION APPARATUS, AND ION BEAM MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To perform emittance measurement and equalization of the intensity distribution of ribbon beams with a simple means.

SOLUTION: A beam profile monitor provided on the orbit of an ion beam IB to measure its beam intensity distribution, and a pair of beam blocking members 6 disposed face to face in the x direction with the ion beam placed between them while forming an opening to pass the ion beam IB between them are used. At least one of the beam blocking members 6 is composed of a plurality of movable blocking plates 61 provided to have no gap in the direction y and to be independently movable in the direction x, and a minute opening P is formed between the beam blocking members 6 facing each other by adjusting the position of the movable blocking plate 61. The emittance of the ion beam is calculated from the measurement result of the intensity distribution on the ion beam which has passed through the minute opening P.

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