| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sample inspection device capable of simplifying a complicated work using a joy stick or a track ball, and improving greatly operability. Ž<P>SOLUTION: This sample inspection device comprises: a microscope 1 equipped with a CCD camera and an illumination device; an image processing device 8 for controlling the microscope 1; an inspection stage 2 for moving an inspection object 3 to an inspection position; a stage drive control device 4 for driving and controlling the inspection stage 2; and a system control device 6 for controlling the whole inspection system. The image processing device 8 includes an input device 8a such as a mouse and a monitor 9 for displaying a processing image, determines a coordinate difference between two designated spots, moves the inspection stage 2 as long as the difference, and moves and displays the target image on a designated position when a target image displayed on a monitor screen is designated by the input device 8a, and a moving destination of the target image is designated on the screen. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
