| 摘要 |
PROBLEM TO BE SOLVED: To provide an imaging apparatus accurately monitoring the vibration state of an excitation member, and to provide an inspection apparatus therefor. SOLUTION: The imaging apparatus includes: a light transmissive optical component 36, disposed at the front of the imaging surface of an imaging means 31; the excitation member 37 for vibrating the optical component; a detection means 40 for detecting vibration sound by the excitation member; and a monitoring means 25 for monitoring the vibration state of the excitation member, on the basis of the vibration sound detected by the detection means. COPYRIGHT: (C)2010,JPO&INPIT
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