| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a two-phase driven static actuator to be driven by application of two-phase voltage thereto. Ž<P>SOLUTION: The static actuator is provided with: a stator having a stator substrate and band-like electrodes formed on the surface thereof; a mover having a mover substrate wherein the electric charges corresponding to the potential of the electrodes are induced; and a power supply unit for applying voltage to the electrodes. In the band-like electrodes in the stator, a plurality of A-phase electrodes and B-phase electrodes are arranged in parallel with each other alternately, and the prescribed electrode interval on both sides in the plurality of electrodes is asymmetrical. The cyclic waveform of an A-phase voltage to be applied to the A-phase electrodes and the cyclic waveform of a B-phase voltage to be applied to the B-phase electrodes, are made to match with each other in cycle and to be different in phase. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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