发明名称 PULSE MOTOR, POSITIONING DEVICE, ALIGNER, AND MANUFACTURING METHOD FOR DEVICES
摘要 <P>PROBLEM TO BE SOLVED: To enhance the thrust of a pulse motor. <P>SOLUTION: The pulse motor is provided with: a first element in which multiple protrusions containing magnetic material are periodically arranged; and a second element placed opposite the first element. One of the first element and the second element functions as a movable portion and the other functions as a fixed portion. The protrusions include multiple first protrusions and multiple second protrusions. The first protrusions includes a part of a first magnetic circuit including a first portion for passing magnetic flux along a first direction. The second protrusions includes a part of a second magnetic circuit including a second portion for passing magnetic flux along a second direction. The second element includes a first coil for passing magnetic flux through the first magnetic circuit and a second coil for passing magnetic flux through the second magnetic circuit. A period for which the movable portion moves includes a period for which timing when the current passed through the first coil is maximized and timing when current passed through the second coil is maximized alternately occur. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009284608(A) 申请公布日期 2009.12.03
申请号 JP20080132359 申请日期 2008.05.20
申请人 CANON INC 发明人 SATO TERUYA
分类号 H02K41/03;H01L21/027 主分类号 H02K41/03
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