| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor that prevents occurrence of peeling or crack of the interface between a gas sensing film and an electrically insulating layer, largely improves the long-term stability and reliability, and improves the heat responsiveness and soaking property of the gas sensing film, and a gas detector having this gas sensor. SOLUTION: This gas sensor includes, for example, the electrically insulating layer 8, a pair of sensing film electrodes 9 formed on the top surface of the electrically insulating layer 8, and the gas sensing film 10 made of oxide semiconductor whose resistance is measured by the sensing film electrodes 9. A dense section (dense film 10a, dense films 10a and 10b, or dense 10c) denser than the gas sensing film 10 is formed on the gas sensing film 10 side of the proximity of the interface between the electrically insulating layer 8 and sensing film electrodes 9 and the gas sensing film 10. COPYRIGHT: (C)2010,JPO&INPIT
|
