发明名称 |
DEPOSITION METHOD AND METHOD OF MANUFACTURING LIGHT-EMITTING DEVICE |
摘要 |
PURPOSE: A deposition method and a method for manufacturing a light emitting device are provided to obtain a desired pattern shape of a material layer smoothly by improving through-put when different plural material layers are sputtered. CONSTITUTION: A light absorption layer(102) is formed in one side of a first substrate(104). A first material layer(103R), a second material layer(103G) and a third material layer(103B) are formed on the light absorption layer. A second substrate(137) is installed in order for one side of the second substrate faces with one plane of the first substrate. The first material layer is evaporated by irradiation of a light. A layer including a first organic compound is formed on the second substrate. A first organic compound, a second organic compound and a third organic compound are low molecular material. |
申请公布号 |
KR20090124948(A) |
申请公布日期 |
2009.12.03 |
申请号 |
KR20090045754 |
申请日期 |
2009.05.26 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
YAMAZAKI SHUNPEI;TANAKA KOICHIRO;IKEDA HISAO;SEO SATOSHI |
分类号 |
H01L51/56;H01L51/54;H05B33/10 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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