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发明名称
Liquid processing apparatus
摘要
申请公布号
EP1848025(B1)
申请公布日期
2009.12.02
申请号
EP20070007786
申请日期
2007.04.17
申请人
TOKYO ELECTRON LIMITED
发明人
KANEKO, SATOSHI;MATSUMOTO, KAZUHISA;ITO, NORIHIRO;AKIMOTO, MASAMI;TOSHIMA, TAKAYUKI;NANBA, HIROMITSU
分类号
H01L21/00;B05B7/00;B05B7/02;B05C11/02;B08B11/02;H01L21/687
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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