PROCESS FOR PRODUCING HIGH DENSITY REFRACTORY METALS&ALLOYS SPUTTERING TARGETS
摘要
<p>The present invention is directed to a process for producing high density, refractory metal products via a press/sintering process. The invention is also directed to a process for producing a sputtering target and to the sputtering target so produced.</p>
申请公布号
EP2125270(A1)
申请公布日期
2009.12.02
申请号
EP20080727680
申请日期
2008.01.15
申请人
H.C. STARCK INC.
发明人
KUMAR, PRABHAT;WOOD, CHARLES, B.;ROZAK, GARY;MILLER, STEVEN, A.;ZEMAN, GLEN;WU, RONG-CHEIN, RICHARD
