| 摘要 |
A vacuum pump comprising a housing (11), rotor shafts (23, 24) supported on the housing (11) at its both ends, and rotors (21, 22) which are rotated integrally with the rotor shafts (23, 24) inside a rotor chamber (14) to suck compressible fluid from a suction port (12) into the rotor chamber (14) and compress it for discharging through a discharge port (13), wherein cooling paths (41, 42) having external paths (41a, 42a) and internal paths (41b, 42b) open on one side of the rotor shafts (23, 24), respectively, and formed by connecting these both paths in a loopback form inside the rotors (21 and 22), respectively, are provided in the rotor shafts (23 and 24), respectively. With such a configuration, a temperature rise on the discharge port side can be suppressed, and continuous operation can be performed even if the capacity, speed, and compression ratio are increased.
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