SENSOR SUBSTRATE AND INSPECTION APPARATUS

摘要

PURPOSE: A sensor substrate and inspection apparatus is provided to improve the test accuracy by minimizing the practical circuit area. CONSTITUTION: The amplifier circuit(30) installed at each sensor circuit comprises the amplification MOS transistor, and the diode transistor block(32) for the diode transistor block(31) for the negative feedback source impedance and the load. The gate of the amplification MOS transistor is used as the input terminal of the amplifier circuit. The diode transistor block for the negative feedback source impedance is connected to the source of the amplification MOS transistor. The diode transistor block for the load is connected to the drain of the amplification MOS transistor. The voltage output port is connected among the diode transistor block for the load to the drain of the amplification unipolar transistor.