THIN FILM DIELECTRICS WITH CO-FIRED ELECTRODES FOR CAPACITORS AND METHODS OF MAKING THEREOF

摘要

PURPOSE: A thin film dielectric with a co-fired electrode for a capacitor and a manufacturing method thereof are provided to manufacture a large area capacitor with high yield by depositing a top electrode before annealing a dielectric thin film. CONSTITUTION: A substrate includes a first electrode or a bare metal foil. A dielectric layer is formed on the substrate by a sputtering or chemical solution deposition. A top conductive layer is deposited on the dielectric layer. The dielectric layer and the top conductive layer are annealed at a temperature more than 800°C at the same time. The dielectric layer has annealed thickness of 0.5~1.0um. The metal foil or the first electrode, the dielectric layer, and the top conductive layer form a capacitor.