发明名称 Device for positioning and blocking thin substrates on a cut substrate block
摘要 <p>A device for positioning and holding thin substrates, especially silicon wafers (4), after cutting, preferably wire sawing, a substrate block (13) comprises a cassette (17) having at least two contact strips (20) facing the block-encompassing elements that engage in the narrow cutting gap (15) between the wafers. An independent claim is also included for a method of using the above device.</p>
申请公布号 EP2127838(A1) 申请公布日期 2009.12.02
申请号 EP20090011321 申请日期 2006.05.26
申请人 SCHMID TECHNOLOGY SYSTEMS GMBH 发明人 GENTISCHER, JOSEF;HABERMANN, DIRK
分类号 B28D5/00;B23D57/00;H01L21/67 主分类号 B28D5/00
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