<p>The invention relates to an arrangement for coating a substrate (4) by means of a vapor distributor (3). This vapor distributor (3) is connected with a vaporizer crucible (7) via an inlet (5). At least one valve (13) is disposed between the crucible (7) and the inlet (5). The vaporizer crucible (7) is located in a chamber (12) which can be evacuated or flooded by means of a vacuum valve (11).</p>
申请公布号
EP2128303(A1)
申请公布日期
2009.12.02
申请号
EP20080009926
申请日期
2008.05.30
申请人
APPLIED MATERIALS, INC.
发明人
BANGERT, STEFAN;DIEGUEZ-CAMPO, JOSE MANUEL;KOENIG, MICHAEL;KRISHNA, NETY M.;KWAK, BYUNG-SUNG LEO