| 摘要 |
PURPOSE: A heater assembly is provided to minimize damage due to plasma and function as an electrostatic chuck by improving a structure of the heater assembly. CONSTITUTION: A plurality of heaters(210) are buried in a heater base(200) concentrically. A metal flange(100) is welded in a lower surface of the heater base. A first electrode base(300) is brazed in an upper side of the heater base. A second electrode base(310) is brazed in an upper side of the first electrode base. An electrode(600) is buried in a boundary of the first and second electrode bases and is connected to an external DC power supply source with a lead wire(610). A gas supply tube(500) passes through the center of the first and second electrode bases, the heater base, and the metal flange. One of helium, argon, nitrogen, and hydrogen is supplied to the gas supply tube.
|
