Gleitbauteil und Verfahren zu seiner Herstellung

摘要

Ceramic sliding member including (a) a ceramic substrate (2, 3) consisting of a dense sintered body of a ceramic material consisting essentially of metal oxide and/or silicate, (b) an intermediate film (7) formed on a mechanically ground surface of the ceramic substrate, the intermediate film being formed from a product produced by pyrolysis of an organosilicon compound and comprising carbon and silicon, and (c) a pyrolytic carbon film (8) formed on the intermediate film, the pyrolytic carbon film being produced by pyrolysis of hydrocarbon and having a graphite-like layered structure, the pyrolytic carbon film serving as a sliding surface (1) of the ceramic sliding member.